ECE 4820 - [Plasma Processing of Electronic Materials]

(crosslisted)
(also MSE 4820)

Spring. 3 credits.

Prerequisite: PHYS 2213 and PHYS 2214 or equivalent.

Staff.

Fundamental principles that govern partially ionized, chemically reactive plasma discharges and their applications to processing electronic materials.

Outcome 1: Understanding the basic mechanisms of plasma physics.

Outcome 2: Understanding the basic mechanisms of material processing.

Outcome 3: Ability to evaluate the output and efficiency of plasma processing units.