AEP 6620 - [Micro and Nano-Fabrication and Processing]

Fall. Not offered: 2021-2022. Next offered: 2023-2024. 3 credits. Letter grades only.

G. Fuchs.

Introduction to the fundamentals of micro and nano-fabricating and patterning thin-film materials and surfaces, with emphasis on electronic and optical materials, micromechanics, and other applications. Vacuum and plasma thin-film deposition processes. Photon, electron, X-ray, and ion-beam lithography. Techniques for pattern replication by plasma and ion processes. Emphasis is on understanding the physics and materials science that define and limit the various processes. At the level of Brodie and Muray.